項目

單位

規格值

氟化銨

NH₄F

wt %

39.6-40.2

氫氟酸

HF

wt %

0.2-0.3

氯化物

Cl

ppm

≤0.5

硝酸鹽

NO₃

ppm

≤0.1

磷酸鹽

PO₄

ppm

≤0.03

硫酸鹽

SO₄

ppm

≤0.1

色度 

APHA

黑曾

≤10

顆粒 (＞0.2μm)

個/mL

Pcs /mL

≤200

銀

Ag

ppb

≤0.1

鋁

Al

ppb

≤0.1

砷

As

ppb

≤0.1

金

Au

ppb

≤0.1

硼

B

ppb

≤0.1

鋇

Ba

ppb

≤0.1

鈹

Be

ppb

≤0.1

鉍

Bi

ppb

≤0.1

鈣

Ca

ppb

≤0.1

鎘

Cd

ppb

≤0.1

鈷

Co

ppb

≤0.1

鉻

Cr

ppb

≤0.1

銅

Cu

ppb

≤0.1

鐵

Fe

ppb

≤0.1

鎵

Ga

ppb

≤0.1

鍺

Ge

ppb

≤0.1

鉀

K

ppb

≤0.1

鋰

Li

ppb

≤0.1

鎂

Mg

ppb

≤0.1

錳

Mn

ppb

≤0.1

鉬

Mo

ppb

≤0.1

鈉

Na

ppb

≤0.1

鈮

Nb

ppb

≤0.1

鎳

Ni

ppb

≤0.1

鉛

Pb

ppb

≤0.1

銻

Sb

ppb

≤0.1

錫

Sn

ppb

≤0.1

鍶

Sr

ppb

≤0.1

鉭

Ta

ppb

≤0.1

鈦

Ti

ppb

≤0.1

鉈

Tl

ppb

≤0.1

釩

V

ppb

≤0.1

鋅

Zn

ppb

≤0.1

鋯

Zr

ppb

≤0.1