?????: +86-599-6655932
?????: +86-599-6654866
??????: +86-599-6655536
????
?????? ????????
|
???? |
???? |
|
??? ????????(SF6)??(????)/10-2 ≥ |
99.999 |
|
(??+???)(O2+Ar)(????)/10-6 ≤ |
2.0 |
|
??(N2)(????)/10-6 ≤ |
2.0 |
|
??? ?????????(CF4) (????)/10-6 ≤ |
1.0 |
|
???????(CO)(????)/10-6 ≤ |
0.5 |
|
???????(CO2)(????)/10-6 ≤ |
0.5 |
|
??(CH4) (????)/10-6 ≤ |
0.5 |
|
??(H2O) (????)/10-6 ≤ |
3.0 |
|
??(HF? ??)????/10-6 ≤ |
0.1 |
|
?? ??? ??(HF? ??)? ????/10-6 ≤ |
0.8 |
|
?????(????)/10-6 ≤ |
10 |
|
?? |
?? ??? ???? |


